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Conferences
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"Modeling of Material Removal for Fixed Abrasive CMP", C. P. Sukam, Jongwon Seok, A. T. Kim, J. A.
Tichy and T. S. Cale, Proceedings of the Seventh International CMP-MIC Conference, Thomas E. Wade
(Ed) IMIC, February 27-March 1, 2002, Santa Clara, California, pp. 85-88.
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"Modeling of the Material Removal for Chemical Mechanical Planarization", C. P. Sukam, Jongwon
Seok, A. T. Kim, J. A. Tichy and T. S. Cale, Proceedings of the AVS Third International Conference on
Microelectronics and Interfaces, Calvin T. Gabriel (Ed) IMIC, February 11-15, 2002, Santa Clara
Convention Center, Santa Clara, California, pp. 79-81.
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"A Multiscale Model for Chemical Mechanical Planarization", A. T. Kim, Jongwon Seok, C. P. Sukam, J.
A. Tichy and T. S. Cale, Proceedings of the Advanced Metallization Conference (AMC) in 2001, Andrew
McKerrow, Yosi Shacham-Diamand, Shigeaki Zaima, Takayuki Ohba (Eds), MRS, October 9-11, 2001,
Montreal, Canada, pp. 405-410.
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"Soft Elastohydrodynamic Lubrication With Roughness", A. T. Kim, Jongwon Seok, J. A. Tichy and T.
S. Cale, Proceedings of 2002 ASME/STLE Joint International Tribology Conference, Oct. 27-30, 2002,
Cancun, Mexico, 2002-TRIB-132.
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"A Multiscale Contact Mechanics and Hydrodynamics Model of Chemical Mechanical Polishing", A. T.
Kim, Jongwon Seok, J. A. Tichy and T. S. Cale, 18th international VLSI Multilevel Interconnection
Conference (VMIC), Thomas E, Wade (Ed.), IMIC, November 27-30, 2001, Santa Clara, California, pp.
129-134.
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"A Study on the Fatigue Failure of Valve System in Rotary Compressor", J. Y. Bae, J. W. Suk, Y. C.
Ma, K. S. Im, Proceedings of the 1994 International Compressor Engineering Conference at Purdue,
Werner Soedel (Ed.), July 19-22, 1994, Purdue, Illinois, pp. 409-414.
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